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" Fundamentals of microfabrication : "


Document Type : BL
Record Number : 847846
Main Entry : Madou, Marc J.
Title & Author : Fundamentals of microfabrication : : the science of miniaturization /\ Marc J. Madou.
Edition Statement : 2nd ed.
Publication Statement : Boca Raton :: CRC Press,, ©2002.
Page. NO : 723 pages :: color illustrations ;; 29 cm
ISBN : 0849308267
: : 9780849308260
Bibliographies/Indexes : Includes bibliographical references and index.
Contents : Lithography -- Pattern transfer with dry etching techniques -- Pattern transfer with additive techniques -- Wet bulk micromachining -- Surface micromachining -- LIGA and micromolding -- A comparison of miniaturization techniques : top-down and bottom-up manufacturing -- Modeling, brains, packaging, sample preparation, and substrate choice -- Scaling, actuators, and power in miniaturized systems -- Miniaturization applications -- Appendix A: Metrology techniques for MEMS -- Appendix B: Living book -- Appendix C: Si and SiO₂ etch rates in KOH -- Appendix D: Genetics -- Appendix E: Suggested further reading -- Appendix F: MEMS companies -- Appendix G: Glossary.
Subject : Integrated circuits-- Design and construction.
Subject : Lasers-- Industrial applications.
Subject : Machining.
Subject : Microelectromechanical systems-- Design and construction.
Subject : Microelectronic packaging.
Subject : Microelectronics.
Subject : Circuits intégrés-- Conception et construction
Subject : Lasers-- Applications industrielles
Subject : Microélectronique
Subject : Mise sous boîtier (Microélectronique)
Subject : Usinage
Subject : Circuit intégré
Subject : Encapsulamento eletrônico.
Subject : Fertigungstechnik
Subject : Integrated circuits-- Design and construction.
Subject : Laser (aplicações industriais)
Subject : Lasers-- Industrial applications.
Subject : LASERS.
Subject : Lithografie
Subject : Machining.
Subject : MACHINING.
Subject : Microelectromechanical systems-- Design and construction.
Subject : Microelectronic packaging.
Subject : Microelectronics.
Subject : MICROELECTRONICS.
Subject : Microeletrônica.
Subject : MICROFIBERS.
Subject : MICROMODULES.
Subject : Mikrofertigung
Subject : Mikrosystemtechnik
Subject : Mise sous boîtier (Électronique)
Subject : Microélectronique.
Subject : Microfabrication.
Dewey Classification : ‭621.3815/2‬
LC Classification : ‭TK7836‬‭.M33 2002‬
NLM classification : ‭53.55‬bcl
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