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" Contamination-free manufacturing for semiconductors and other precision products / "


Document Type : BL
Record Number : 947452
Doc. No : b701822
Title & Author : Contamination-free manufacturing for semiconductors and other precision products /\ edited by Robert P. Donovan.
Publication Statement : New York :: Marcel Dekker,, 2001.
Page. NO : x, 448 pages :: illustrations ;; 24 cm
ISBN : 0824703804
: : 9780824703806
Bibliographies/Indexes : Includes bibliographical references and index.
Contents : National technology roadmap for semiconductors : basis and alignment / David Jensen -- Off-wafer measurement of contaminants / Robert P. Donovan -- On-wafer measurement of particles / Rodolfo E. Díaz, Brent M. Nebeker, and E. Dan Hirleman -- On-wafer measurement of molecular contaminants / Victor K.F. Chia and Michael J. Edgell -- Transport and deposition of aerosol particles / Anthony S. Geller and Daniel J. Rader -- Particulate deposition in liquid systems / Deborah J. Riley -- Deposition of molecular contaminants in gaseous environments / Allyson L. Hartzell -- Organic contamination removal / Steven Verhaverbeke and Kurt Christenson -- Deposition of metallic contaminants from liquids and their removal / Steven Verhaverbeke -- Sources of contamination and their control / David Jensen.
Subject : Semiconductors-- Defects.
Subject : Semiconductors-- Design and construction.
Subject : CONTAMINANTS.
Subject : CONTAMINATION.
Subject : DEFECTS.
Subject : DESIGN.
Subject : Fertigung
Subject : Halbleitertechnologie
Subject : MANUFACTURING.
Subject : PRECISION.
Subject : SEMICONDUCTOR DEVICES.
Subject : SEMICONDUCTORS (MATERIALS)
Subject : Semiconductors-- Defects.
Subject : Semiconductors-- Design and construction.
Dewey Classification : ‭621.3815/2‬
LC Classification : ‭TK7871.85‬‭.C6175 2001‬
NLM classification : ‭RL 70‬blsrissc
: ‭ZN 4100‬rvk
Added Entry : Donovan, R. P.
copyhttps://lib.clisel.com/site/catalogue/947452
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