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" Gate dielectric integrity : "
Dinesh C. Gupta and George A. Brown, editors.
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BL
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| Record Number
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963907
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| Doc. No
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b718277
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| Title & Author
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Gate dielectric integrity : : material, process, and tool qualification /\ Dinesh C. Gupta and George A. Brown, editors.
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| Publication Statement
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West Conshocken, Pa. :: ASTM,, ©2000.
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| Series Statement
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STP ;; 1382
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| Page. NO
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xi, 169 pages :: illustrations ;; 23 cm.
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| ISBN
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0803126158
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: 9780803126152
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| Notes
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Conference on Gate Dielectric Integrity, held Jan. 25, 1999, San Jose, Calif.
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| Bibliographies/Indexes
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Includes bibliographical references.
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| Subject
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Dielectrics-- Testing.
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Gate array circuits-- Materials.
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Integrated circuits-- Wafer-scale integration-- Reliability.
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Semiconductor wafers-- Reliability.
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Silicon oxide films-- Testing.
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Dielectrics-- Testing.
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Gate array circuits-- Materials.
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Integrated circuits-- Wafer-scale integration-- Reliability.
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Semiconductor wafers-- Reliability.
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| Dewey Classification
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621.3815/2
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| LC Classification
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TK7871.85.G32 2000
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| Added Entry
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Brown, George A.,1937-
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Gupta, D. C., (Dinesh C.)
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| Added Entry
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Conference on Gate Dielectric Integrity(1999 :, San Jose, Calif.)
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