| Document Type
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BL
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| Record Number
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973995
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| Doc. No
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b728365
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| Title & Author
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Handbook of ion beam processing technology : : principles, deposition, film modification, and synthesis /\ edited by Jerome J. Cuomo and Stephen M. Rossnagel, Harold R. Kaufman.
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| Edition Statement
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Reprint ed.
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| Publication Statement
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Park Ridge, N.J., U.S.A. :: Noyes Publications,, ©1989.
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| Page. NO
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1 online resource (xviii, 438 pages) :: illustrations
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| ISBN
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0815517564
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: 9780815517566
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| Bibliographies/Indexes
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Includes bibliographical references and index.
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| Contents
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Perspective on past, present and future uses of ion beam technology / Jerome J. Cuomo, Stephen M. Rossnagel and Harold R. Kaufman -- Gridded broad-beam ion sources / Harold R. Kaufman and Raymond S. Robinson -- Electron cyclotron resonance (ECR) ion sources / William M. Holber -- Hall effect ion sources / Raymond S. Robinson and Harold R. Kaufman -- Ionized cluster bean (ICB) deposition and epitaxy / Isao Yamada and Toshinori Takagi -- Quantitative sputtering / Peer C. Zalm -- Laser- induced fluorescence as a tool for the study of ion beam sputtering / Wallis F. Calaway [and others] -- Characterization of atoms desorbed from surfaces by ion bombardment using multiphoton ionization detection / David L. Pappas, Nicholas Winograd and Fred M. Kimock.
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The application of positionization for sputtering studies and surface or thin film analysis / Hans Oechsner -- The modification of films by ion bombardment / Eric Kay and Stephen M. Rossnagel -- Control of film properties by ion-assisted deposition using broad beam sources / Ronnen A. Roy and Dennis S. Yee -- Etching with directed beams / Michael Geis [and others] -- Film growth modification by concurrent ion bombardment : theory and simulation / Karl-Heinz Muller -- Interface structure and thin film adhesion / John Baglin -- Modification of thin films by off-normal incidence ion bombardment / R. Mark Bradley -- Ion beam interactions with polymer surfaces / Robert C. White and Paul S. Ho.
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Topography : texturing effects / Bruce A. Banks -- Methods and techniques of ion beam processes / Stephen M. Rossnagel -- Ion-assisted dielectric and optical coatings / Phil J. Martin and Roger P. Netterfield -- Diamond and diamond-like thin films by ion beam techniques / Makoto Kitabatake and Kiyotaka Wasa.
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| Abstract
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Encompasses the entire range of industrial refractory materials and forms: properties and their measurement, applications, manufacturing, installation and maintenance techniques, quality assurance, and statistical process control.
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| Subject
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Ion bombardment-- Industrial applications.
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Ion implantation.
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Bombardement ionique-- Applications industrielles.
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| Subject
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Ions-- Implantation.
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Ion bombardment-- Industrial applications.
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Ion implantation.
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TECHNOLOGY ENGINEERING-- Electronics-- Digital.
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TECHNOLOGY ENGINEERING-- Electronics-- Microelectronics.
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| Dewey Classification
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621.381/7
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| LC Classification
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QC702.7.I55H36 1989eb
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| Added Entry
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Cuomo, J. J.
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Kaufman, Harold R.
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Rossnagel, Stephen M.
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