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" Chemical vapor deposition for microelectronics : "


Document Type : BL
Record Number : 974215
Doc. No : b728585
Main Entry : Sherman, Arthur,1931-
Title & Author : Chemical vapor deposition for microelectronics : : principles, technology, and applications /\ by Arthur Sherman.
Edition Statement : Reprint ed.
Publication Statement : Park Ridge, N.J. :: Noyes Publications,, ©1987.
Series Statement : Materials science and process technology series
Page. NO : 1 online resource (xi, 215 pages) :: illustrations.
ISBN : 0815516398
: : 9780815516392
Bibliographies/Indexes : Includes bibliographical references and index.
Subject : Integrated circuits-- Design and construction.
Subject : Vapor-plating.
Subject : Integrated circuits-- Design and construction.
Subject : TECHNOLOGY ENGINEERING-- Electronics-- Digital.
Subject : TECHNOLOGY ENGINEERING-- Electronics-- Microelectronics.
Subject : Vapor-plating.
Dewey Classification : ‭621.381/7‬
LC Classification : ‭TS695‬‭.S54 1987eb‬
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