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" Electron-beam-induced nanometer-scale deposition / "
edited by Natalia Silvis-Cividjian, Cornelis W. Hagen.
Document Type
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BL
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Record Number
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975116
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Doc. No
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b729486
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Title & Author
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Electron-beam-induced nanometer-scale deposition /\ edited by Natalia Silvis-Cividjian, Cornelis W. Hagen.
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Publication Statement
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Amsterdam ;Boston :: Elsevier Academic Press,, ©2006.
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Series Statement
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Advances in imaging and electron physics ;; v. 143
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Page. NO
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1 online resource (xv, 247 pages) :: illustrations.
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ISBN
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0080465358
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: 0120147858
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: 1280707488
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: 6610707480
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: 9780080465357
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: 9780120147854
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: 9781280707483
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: 9786610707485
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Bibliographies/Indexes
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Includes bibliographical references (pages 219-235) and index.
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Contents
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Introduction. -- Electron-beam-induced nanometer-scale deposition: a literature survey. -- The theory of EBID spatial resolution. -- The role of secondary electrons in EBID. -- Delocalization effects in EBID.
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Abstract
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Advances in Imaging and Electron Physics merges two long-running serials-Advances in Electronics and Electron Physics and Advances in Optical and Electron Microscopy. This series features extended articles on the physics of electron devices (especially semiconductor devices), particle optics at high and low energies, microlithography, image science and digital image processing, electromagnetic wave propagation, electron microscopy, and the computing methods used in all these domains.
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Subject
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Molecular electronics.
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Subject
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Nanotechnology.
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Subject
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Molecular electronics.
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Subject
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Nanotechnology.
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Subject
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TECHNOLOGY ENGINEERING-- Nanotechnology MEMS.
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Dewey Classification
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620/.5
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LC Classification
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T174.7.E44 2006eb
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TA
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Added Entry
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Cividjian, Natalia,1967-
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Hagen, Cornelis W.
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