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" Design and manufacturing of active microsystems / "
Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach, Editors.
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BL
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| Record Number
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978932
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b733302
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| Title & Author
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Design and manufacturing of active microsystems /\ Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach, Editors.
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| Publication Statement
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Berlin ;Heidelberg ;New York :: Springer,, ©2011.
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| Series Statement
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Microtechnology and MEMS
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| Page. NO
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1 online resource (xii, 444 pages) :: color illustrations
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| ISBN
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3642129021
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: 364212903X
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: 9783642129025
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: 9783642129032
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9783642129025
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Includes bibliographical references and index.
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| Contents
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pt. 1. Design and construction -- pt. 2. Guiding and measuring in active microsystems -- pt. 3. Manufacturing and fabrication -- pt. 4. Microassembly -- pt. 5. Industrial applications.
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| Abstract
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This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.
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Microtechnology.
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Chimie.
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Microtechnology.
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Science des matériaux.
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TECHNOLOGY ENGINEERING-- Electronics-- Digital.
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TECHNOLOGY ENGINEERING-- Electronics-- Microelectronics.
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| Dewey Classification
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621.381
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| LC Classification
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TK7874.D47 2011
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| Added Entry
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Burisch, Arne.
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Büttgenbach, S., (Stephanus),1945-
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Hesselbach, Jürgen.
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