| Document Type
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BL
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| Record Number
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982450
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| Doc. No
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b736820
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| Title & Author
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Handbook of silicon based MEMS materials and technologies /\ Veikko Lindroos [and others].
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| Edition Statement
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1st ed.
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| Publication Statement
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Amsterdam ;Boston :: William Andrew/Elsevier,, 2010.
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| Series Statement
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Micro & nano technologies
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| Page. NO
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1 online resource (xxxii, 636 pages) :: illustrations
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| ISBN
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0080947727
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: 9780080947723
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0815515944
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9780815515944
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| Bibliographies/Indexes
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Includes bibliographical references and index.
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| Contents
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Front Cover; Handbook of Silicon Based MEMS Materials and Technologies; Copyright Page; Contents; Preface; List of Contributors; Overview; PART I: Silicon as MEMS Material; PART II: Modeling in MEMS Methods; PART III: Measuring MEMS; PART IV: Micromachining Technologies in MEMS; PART V: Encapsulation of MEMS Components; Appendix 1 Common Abbreviations and Acronyms; Appendix 2 Nanoindentation Characterization of Silicon and other MEMS Materials; Index.
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| Abstract
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A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. . Key topics covered include: .: . .; Silicon as MEMS material .; Material properties and measurement techniques .; Analytical methods used in materials characterization .; Modeling in MEMS .; Measuring MEMS .; Micromachining technologies in MEMS .; Encapsulation of MEMS components .; Emerging process technologies, including ALD and porous silicon ... Written by 73 world class MEMS contributors from around the glo.
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| Subject
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Microelectromechanical systems-- Materials.
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Microelectromechanical systems.
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| Subject
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Silicon-- Electric properties.
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| Subject
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MEMS
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Microelectromechanical systems-- Materials.
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Microelectromechanical systems.
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Silicium
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Silicon-- Electric properties.
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TECHNOLOGY ENGINEERING-- Electronics-- Semiconductors.
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| Subject
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TECHNOLOGY ENGINEERING-- Electronics-- Solid State.
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| Dewey Classification
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621.38152
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| LC Classification
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TK7875.H36 2010eb
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| NLM classification
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ZN 3750rvk
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ZN 3750.rvk
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| Added Entry
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Lindroos, Veikko.
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