| Document Type
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BL
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| Record Number
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984750
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| Doc. No
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b739120
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| Title & Author
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Silicon carbide micro electromechanical systems for harsh environments /\ editor Rebecca Cheung.
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| Publication Statement
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London :: Imperial College Press,, ©2006.
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| Page. NO
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1 online resource (x, 181 pages) :: illustrations
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| ISBN
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1281347566
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: 1860949096
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: 6611347569
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: 9781281347565
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: 9781860949098
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: 9786611347567
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1860946240
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9781860946240
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9781860949098
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| Bibliographies/Indexes
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Includes bibliographical references.
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| Contents
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Ch. 1. Introduction to Silicon Carbide (SiC) Microelectromechanical Systems (MEMS) / Rebecca Cheung -- ch. 2. Deposition techniques for SiC MEMS / Christian A. Zorman, Xiao-An Fu and Mehran Mehregany -- ch. 3. Review of issues pertaining to the development of contacts to silicon carbide: 1996-2002 / Lisa M. Porter and Feroz A. Mohammad -- ch. 4. Dry etching of SiC / S.J. Pearton -- ch. 5. Design, performance and applications of SiC MEMS / Stefan Zappe.
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| Abstract
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This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for application.
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| Subject
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Microelectromechanical systems.
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Silicon carbide.
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| Subject
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Microelectromechanical systems.
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| Subject
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Silicon carbide.
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| Subject
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TECHNOLOGY ENGINEERING-- Electronics-- Digital.
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| Subject
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TECHNOLOGY ENGINEERING-- Electronics-- Microelectronics.
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| Dewey Classification
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621.381
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| LC Classification
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TK7875.S55 2006eb
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| Added Entry
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Cheung, Rebecca.
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| Parallel Title
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Silicon carbide microelectromechanical systems for harsh environments
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